3 how to contact inficon, 1 returning your q-pod, 4 specifications – INFICON Q-pod Thin Film Deposition Monitor User Manual
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Q-pod Operating Manual
1.3 How to Contact INFICON
where you can contact:
A Technical Support Engineer with questions regarding applications for and
programming the Q-pod.
A Service Engineer with questions regarding troubleshooting, diagnosing or
repairing a defective Q-pod.
Sales and Customer Service, to find the INFICON Sales office nearest to you.
Repair Service, to find the INFICON Service Center nearest to you.
If you are experiencing a problem with your Q-pod, please have the following
information readily available:
The serial number and firmware version for your Q-pod.
A description of your problem.
An explanation of any corrective action that you may have already attempted.
The exact wording of any error messages that you may have received.
1.3.1 Returning Your Q-pod
Do not return any component of your Q-pod to INFICON without first speaking with
a Customer Support Representative. You must obtain a Return Material
Authorization (RMA) number from the Customer Support Representative.
If you deliver a package to INFICON without an RMA number, your package will be
held and you will be contacted. This will result in delays in servicing your Q-pod.
1.4 Specifications
Frequency Range. . . . . . . . . . . . . . . 1 to 6 MHz
Frequency Resolution . . . . . . . . . . . 0.05 Hz at 6 MHz @ 2 measurements per
second)
Frequency Accuracy . . . . . . . . . . . . 0.002%
Frequency Stability. . . . . . . . . . . . . . ±2 ppm total, over 0º to 50ºC
Thickness & Rate Resolution . . . . . . 0.0613 Å (new crystal); 0.1091 Å (crystal @
4.5 MHz); over 500 ms sample for material
density = 1.0, Z-ratio = 1.0
Input . . . . . . . . . . . . . . . . . . . . . . . . . BNC
Interface & Power. . . . . . . . . . . . . . . USB, v2.0 or later, 15 ft. (457 cm) maximum
allowable length
Size . . . . . . . . . . . . . . . . . . . . . . . . . 1 in. x 2 in. x 2.5 in. (25 mmx 50 mm x 64 mm)