INFICON Q-pod Thin Film Deposition Monitor - Manual (Page 21)

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Q-pod Operating Manual
2.3.1.2 Materials Grid
In the right grid, edit the Density, Z-Factor and Tooling values for the materials
being deposited. Move your mouse over each setting to see a brief description.
2.3.2 Setup Display
The lower section of the main screen is where run parameters can be changed and
Q-pod communication information is presented.
2.3.2.1 DataLog
Sets the file name, location and operation of disk data logging. Data log files can
be set to overwrite the file name each time it is saved. It can append the data, by
adding the newly recorded data to the end of the same file. It can also save each
run in a new file designated by run number. Data is saved in comma delimited
format for easy import into a spreadsheet.
2.3.2.2 Measurement
Sets the basic measurement parameters for all Q-pods. The values shown above
are correct for most applications.
2.3.2.3 Display
Sets the display parameters.Thickness can be displayed in kÅ or Å. Mass can be
displayed in ug/cm
2 . Rate will be changed to ng/cm 2 /sec if mass is the chosen
option. Resolution of displayed readings may also be changed here (0.0 or 0.00).
The rate reading filter can be set in this section. The Filter number represents how
many measurements are averaged together to produce the displayed rate. The
number of Q-pods being used is defined in this section as well.
2.3.2.4 Q-pods
Sets the name and displays the serial number of the Q-pod assigned to each
measurement channel. A strike-through serial number indicates the Q-pod is not
connected. The software can monitor a maximum of 8 Q-pods simultaneously.