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2 troubleshooting the q-pod – INFICON Q-pod Thin Film Deposition Monitor User Manual

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Q-pod Operating Manual

4.1.2 Troubleshooting the Q-pod

Table 4-1 General Troubleshooting

SYMPTOM

CAUSE

REMEDY

1. Crystal fail message is
always on.

a. Q-pod and/or sensor not
connected.

a. Verify proper
Q-pod/sensor connections.

b. Q-pod malfunctioning.

b. If available, insert a known
working Q-pod, or other
monitor, in place of suspect
one; if Q-Pod is confirmed
bad, contact INFICON
service department.

c. Defective cable from
feedthrough to Q-pod.

c. Use an Ohm meter or
DMM to check electrical
continuity or isolation as
appropriate.

d. Poor electrical contact in
the sensor, feedthroughs, or
in-vacuum cable.

d. Use an Ohm meter or
DMM to check electrical
continuity or isolation as
appropriate.

e. Failed crystal/no crystal.

e. Replace crystal with new
INFICON crystal.

f. Two crystals placed into the
crystal holder.

f. Remove one of the
crystals.

g. Frequency of crystal out of
range,

g. Verify that the crystal
frequency is within the
required range, use
INFICON crystals. Set the
desired range on the main
screen on the software.