INFICON UHV Bakeable Sensor - Manual (Page 32)

3 - 2
PN
07
4-
15
4N
UHV Bakeable Sensor Operating Manual
9 Attach the P port of the solenoid valve to a source of air. The air supply must
be 70 psi (gauge) {85 psi (absolute)} (5.8 bar (absolute)) [584 kPa (absolute)]
(minimum) to 80 psi (gauge) {95 psi (absolute)} (6.5 bar (absolute))
[653 kPa (absolute)] (maximum) (see
Pneumatic Connections, section 3.3 .)
WARNING
Do not exceed 100 psi (gauge) {115 psi (absolute)}
(7.9 bar (absolute)) [791 kPa (absolute)].
Connection to excessive pressure may result in personal
injury or equipment damage.
CAUTION
Maximum temperature for the solenoid valve assembly
is 105 °C for bakeout and operation.
10 Make electrical connections to the solenoid valve (see Electrical Connections,
section 3.4 ).
3.3 Pneumatic Connections
Figure 3-1 Pneumatic solenoid valve tube connections
To Air
Fitting Of
Feedthrough
(Normally Open)
A Output
Port
P Supply
(Normally Closed)
Tube Fitting
Air Supply
(Provided With Valve)
Exhaust