INFICON UHV Bakeable Sensor User Manual
Page 28
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PN
07
4-
15
4N
UHV Bakeable Sensor Operating Manual
7
If the bakeable sensor has a shutter:
7a
Attach air connection to solenoid valve (see
) and adjust air
pressure to be 70 psi (gauge) {85 psi (absolute)} (5.8 bar (absolute))
[584 kPa (absolute)] (minimum) to 80 psi (gauge) {95 psi (absolute)}
(6.5 bar (absolute)) [653 kPa (absolute)] (maximum).
WARNING
Do not exceed 100 psi (gauge) {115 psi (absolute)}
(7.9 bar (absolute)) [791 kPa (absolute)].
Connection to excessive pressure may result in personal
injury or equipment damage.
7b
Activate the solenoid valve (the manual override button may be used), and
verify that the sensor shutter moves smoothly and rapidly to completely
expose the crystal opening. Deactivate the solenoid valve and verify that
the shutter completely covers the crystal opening.
NOTE: If adjustment of the shutter position is needed, loosen the socket screw
on the shutter assembly, rotate the shutter to the desired position, and
tighten the socket screw.
8
Because of geometric factors, variations in surface temperature, and
differences in electrical potential, the crystal and substrates often do not
receive the same amount of material. Calibration is required to make sure the
thickness indication on the instrument accurately represents the thickness on
the substrates. Refer to the instrument operating manual for calibration
procedures.
9
for other installation requirements, including
maximum operating temperatures.
10
See
for recommendations concerning improved
cooling for the UHV Bakeable Sensor.