INFICON UHV Bakeable Sensor - Manual (Page 23)

2 - 3
PN
07
4-
15
4N
UHV Bakeable Sensor Operating Manual
2.1.3 Sensor Check with Q-pod ™ or STM-2 Deposition Monitor
1 Connect one end of the 15.2 cm (6 in.) BNC cable (PN 782-902-011)
to the BNC connector on the feedthrough.
2 Connect the other end of the 15.2 cm (6 in.) BNC cable to the connector
of the Q-pod or STM-2.
3 Connect one end of the USB cable (PN 068-0472) to the mating connector
of the Q-pod or STM-2.
4 Connect the other end of the USB cable to a USB port on the computer being
used to operate the Q-pod or STM-2.
5 Install the crystal as instructed by section 4.2 on page 4-3 .
6 Launch the appropriate monitor software.
7 Set density at 1.00 g/cm
3
.
8 Zero the thickness. The display will indicate 0 or ± 0.001 kÅ. Crystal life should
read from 95 to 100%. The green indicator on the Q-pod or STM-2 should be
illuminated.
9 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 kÅ
should display. When the moisture evaporates, the thickness indication should
return to approximately zero. If these conditions are observed, the sensor is in
proper working order and may be installed (see
section 2.3 on page 2-7 ).