INFICON UHV Bakeable Sensor - Manual (Page 31)

3 - 1
PN
07
4-
15
4N
UHV Bakeable Sensor Operating Manual
Chapter 3
Solenoid Valve Assembly Installation
3.1 Introduction
The solenoid valve assembly (PN 750-420-G1, see Figure 3-2 on page 3-4 ) and
the shuttered UHV Bakeable Sensor assembly should be installed at the same
time.
3.2 Installation with the UHV Bakeable Sensor
1 Align the score line on the solenoid valve bracket (see Figure 3-2 on page 3-4 )
over the edge of a table or other square edge.
2 Using pliers, grasp the part of the bracket extending over the edge and push
down. The assembly will break along the score line.
3 Use a file to smooth any rough edges which occur along the break.
4 Insert the bakeable sensor through the mating flange on the vacuum chamber.
5 Place the solenoid valve bracket at the desired position on the outside of the
feedthrough, with the two holes in the bracket aligned with two of the
feedthrough bolt holes.
6 Install and tighten the feedthrough bolts.
7 Remove the quick disconnect air fitting from the exhaust port of the
solenoid valve (see
Pneumatic Connections, section 3.3 ) and thread it into the
#10-32 fitting adapter on the feedthrough air tube.
8 Connect the 3.175 mm (0.125 in.) air tube from the A port of the solenoid valve
to the quick disconnect fitting installed in step 7 (see
Pneumatic Connections,
section 3.3 ).