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Chapter 5 communications – INFICON SQC-222 Thin Film Deposition Controller User Manual

Page 75

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Chapter 5 Communications

5-5

Parameters: [1..6]

Description: Read the current Frequency for a channel.

Example:

P2

A5701563.2 Channel two’s current Frequency 5701563.2Hz

Command: R

Parameters: [1..6]

Description: Read the Crystal Life for a channel.

Example:

R3

A57.82

Channel three’s remaining life is 57.82%.

Command: S

Parameters: None.

Description: Zero Average Thickness and Rate.

Example:

S

A

Command: T

Parameters: None.

Description: Zero Time

Example:

T

A

Zeroes time display on unit.

Command: U

Parameters: 0,1, or ?

Description: Toggles shutter open/closed or reads shutter state.

Example:

U1

A

Shutter is opened

U?

A1

Shutter Status is open