INFICON SQC-222 Thin Film Deposition Controller - Manual (Page 58)

Chapter 3 Menus
3-20
Rate Sampling: Rate sampling can extend the life of crystals. With rate sampling, the
deposition rate is sampled for a period of time, then the sensor shutter is closed. Power
is then held at the same level as the final power setting during the sample period.
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Continuous selects no sampling, the sensor shutter remains open during deposition.
•
Time based sampling opens the shutter for a fixed period of time, then closes it for a
˛fixed time.
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Accuracy based sampling opens and closes the shutter at the rate required to
maintain the desired accuracy during the hold phase.