Chapter 5 communications – INFICON SQC-222 Thin Film Deposition Controller User Manual
Page 74
Chapter 5 Communications
5-4
Command: L
Parameters: [1..6]
Description: Read the current Rate for a channel.
Example:
L1
A9.32
Channel one’s rate is 9.32 Angstroms/S
Command: M
Parameters: None.
Description: Read the current Average Rate.
Example:
M
A10.42
Average Rate is 10.42 Angstroms/S
Command: N
Parameters: [1..6]
Description: Read the current thickness for a channel.
Example:
N4
A1.187
Channel four’s Thickness is 1.187 Kilo Angstroms.
Command: O
Parameters: None.
Description: Read the current Average Thickness
Example:
O
A2.376
The current Average Thickness is 2.376 kilo
Angstroms.
Command: P
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