INFICON UL1000 Helium leak detector - Manual (Page 96)

96
Error And Warning Messages
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E34 24V voltage at MSV board is
too low! Signal MVPZN on the MSV board is active. 24 V signal voltage is too low,
U < 18.3 V.
• Fuse F1 on the MSV board has blown.
• 24 V power supply voltage is missing.
Switch off the UL1000 and UL1000 Fab!
The missing voltage will cause the exhaust valve on the scroll pump to
close which in turn can lead to a contamination of the vacuum system.
• Reference voltage UREF on the MSV board XT7/1 is too high, U > 5 V.
E35 Anode-cathode voltage is too
high! • MSV board is faulty.
• Anode-cathode voltage is higher than 130 V.
E36 Anode-cathode voltage is too
low. • MSV board is faulty.
• Anode-cathode voltage is lower than 130 V.
E37 Suppressor voltage reference
value too high! Signal MFSZH on MSV board is active. Suppressor signal command
variable is too high.
• Suppressor voltage has a short circuit.
• MSV is faulty.
E38 Suppressor potential too
high! Suppressor potential is higher than 363V.
• MSV board is faulty.
E39 Suppressor potential is too
low. Supressor potential is lower than 297V.
• MSV board is faulty.
E40 The anode potential exceeds
its norminal value by over
10%! The actual anode potential exceeds its nominal value by 10%. The
nominal value can be displayed in the service menu.
• MSV is faulty.
E41 The anode potential has
dropped below its nominal
value by over 10%! The actual anode potential has dropped below its nominal value by 10%.
The nominal value can be displayed in the service menu.
• Air inrush.
• MSV is faulty.
E42 Nominal value of the anode
potential is too high! Signal MFAZH on MSV board is active.
• Anode voltage has been short circuited.
• Nominal value of the anode voltage is too high. Anode voltage is limited
to about 1,200 V.
E43 Cathode current is too high! • Signal MPKZH on MSV board is active. Cathode current is too high, I
> 3.6 A.
• MSV is faulty.
E44 Cathode current is too low! • Signal MPKZN on MSV board is active. Cathode current is too low, I >
0.2 A.
• MSV is faulty.
W45 Emission for cathode 1 can
not be switched on!
Signal MSIBE on MSV board is not active. Emission for cathode 1 can not
be switched on. UL1000 and UL1000 Fab switches to cathode 2. Plesae
order a new ion source.
W46 Emission for cathode 2 can
can not be switched.
Signal MSIBE on MSV board is not active. Emission for cathode 2 can not
be switched on. UL1000 and UL1000 Fab switches to cathode 1. Order a
new ion source.
No. Displayed Message Description and possible solutions