INFICON UL1000 Helium leak detector - Manual (Page 101)

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iina70e 09.fm technical handbook (1408)
9.4 Maintenance Plan
Subassembly Maintenance work Operating hours/years Service
level
Spare part
UL1000 / UL1000 Fab 1500 4000 8000 16000 24000 number
1/4 1 2 3 4
Vacuum system
Backing pump D16 B Check oil level, if required exchange X I & II
Exchange the oil 2 X II 20099091
Refurbish backing pump X III
Scroll pump Agilent Exchange the tip seal X
1
III 200001671
TS 620 Exchange the scroll head X III 200001665R
SplitFlow 80 Exchange the operating agent reservoir X
2
II u. III 200003801
Bearing exchange X
2
III
Valve block Clean the valves, replace valve seals 2 X III 200000594
Disassemble and clean the valve block 2 X III 200000593
Replace filter of vent and purge gas line 1 X
1
I, II ,III 200000683
Align Pirani gauge X III
Silencer UL1000 Fab Replace X
1
I, II, III 20099183
Exhaust filter UL1000 Check, empty X I, II, III
Replace filter insert X
1
I, II, III 200000694
Electrical system
Fan subassemblies Blow out fan chassis wall and bottom 1 X
1
I
Replace replacement filter cell for chassis
wall fan 1 X
1
I 200000685