INFICON UL1000 Helium leak detector - Manual (Page 102)

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Maintenance Work
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9.5 Maintenance Groups
For better overview the maintenance plan for the UL1000 and UL1000 Fab/UL1000
can be subdivided in to 4 maintenance groups.
• 1500 hours maintenance
• 4000 hours maintenance, at least once a year
• 8000 hours maintenance
• 16000 hours maintenance
9.5.1 1500 Hours Maintenance
The 1500 hours maintenance can be performed by an operator or maintenance staff
of the customer.
For performing the 1500 hrs maintenance, the filter cell in front of the fans must be
checked and, if contaminated, replaced. When using the leak detector in a very dusty
environment, the service intervals should be adapted to the shorter operating hours.
The silencer at the exhaust of the leak detector must be replaced.
Notice: Blocked silencers can result in further damage to the scroll pump.
9.5.2 4000 Hours Maintenance
The 4000 hours maintenance work should be done by an INFICON service
technician or a person authorised by INFICON, were by this work should be done
once a year. The operating agent reservoir of the turbomolecular pump and the oil of
the backing pump in the UL1000 must be exchanged at least once a year
SplitFlow 80.
Notice: The internal helium calibrated leak has a certificate which is valid for 1 year
after delivery of the leak detector. It is recommended to have this certificate
renewed yearly by INFICON GmbH. Here the internal helium calibrated
leak is checked as to all its functions and a new certificate is issued for a
further year.
Work to be done Required materials Part No.
Check/replace filter
Replace silencer
Replacement filter cell for the fan
Silencer for exhaust (UL1000 Fab only)
200000685
20099183