Dwyer GFM4 User Manual
Page 20
Actual Gas
Phosgene COCl2
Phosphine PH3
Phosphorous Oxychloride POCl3
Phosphorous Pentafluoride PH5
Phosphorous Trichloride PCl3
Propane C3H8
Propylene C3H6
Silane SiH4
Silicon Tetrachloride SiCl4
Silicon Tetrafluoride SiF4
Sulfur Dioxide SO2
Sulfur Hexafluoride SF6
Sulfuryl Fluoride SO2F2
Tetrafluoroethane (Forane 134A) CF3CH2F
Tetrafluorohydrazine N2F4
Trichlorofluoromethane (Freon-11) CCl3F
Trichlorosilane SiHCl3
1,1,2-Trichloro-1,2,2 Trifluoroethane
(Freon-113) CCl2FCClF2
Triisobutyl Aluminum (C4H9)AL
Titanium Tetrachloride TiCl4
Trichloro Ethylene C2HCl3
Trimethylamine (CH3)3N
Tungsten Hexafluoride WF6
Uranium Hexafluoride UF6
Vinyl Bromide CH2CHBr
Vinyl Chloride CH2CHCl
Xenon Xe
Index
108
109
110
111
112
113
114
115
116
117
118
119
120
121
122
123
124
125
126
127
128
129
130
131
132
133
134
K-Factor
Relative to N
2
.4438
.759
.36
.3021
.30
.35
.40
.5982
.284
.3482
.69
.2635
.3883
.5096
.3237
.3287
.3278
.2031
.0608
.2691
.32
.2792
.2541
.1961
.4616
.48
1.44
Cp
(Cal/g)
.1394
.2374
.1324
.1610
.1250
.399
.366
.3189
.1270
.1691
.1488
.1592
.1543
.127
.182
.1357
.1380
.161
.508
.120
.163
.3710
.0810
.0888
.1241
.12054
.0378
Density
(g/l)
4.418
1.517
6.843
5.620
6.127
1.967
1.877
1.433
7.580
4.643
2.858
6.516
4.562
4.224
4.64
6.129
6.043
8.36
8.848
8.465
5.95
2.639
13.28
15.70
4.772
2.788
5.858
APPENDIX IV - Component Diagram
GFM3/4 Analog PC Board TOP
Page 20