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Dwyer GFM4 User Manual

Page 20

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Actual Gas
Phosgene COCl2

Phosphine PH3

Phosphorous Oxychloride POCl3

Phosphorous Pentafluoride PH5

Phosphorous Trichloride PCl3

Propane C3H8

Propylene C3H6

Silane SiH4

Silicon Tetrachloride SiCl4

Silicon Tetrafluoride SiF4

Sulfur Dioxide SO2

Sulfur Hexafluoride SF6

Sulfuryl Fluoride SO2F2

Tetrafluoroethane (Forane 134A) CF3CH2F

Tetrafluorohydrazine N2F4

Trichlorofluoromethane (Freon-11) CCl3F

Trichlorosilane SiHCl3

1,1,2-Trichloro-1,2,2 Trifluoroethane
(Freon-113) CCl2FCClF2

Triisobutyl Aluminum (C4H9)AL

Titanium Tetrachloride TiCl4

Trichloro Ethylene C2HCl3

Trimethylamine (CH3)3N

Tungsten Hexafluoride WF6

Uranium Hexafluoride UF6

Vinyl Bromide CH2CHBr

Vinyl Chloride CH2CHCl

Xenon Xe

Index
108
109
110
111
112
113
114
115
116
117
118
119
120
121
122
123
124
125

126
127
128
129
130
131
132
133
134

K-Factor
Relative to N

2

.4438
.759
.36
.3021
.30
.35
.40
.5982
.284
.3482
.69
.2635
.3883
.5096
.3237
.3287
.3278
.2031

.0608
.2691
.32
.2792
.2541
.1961
.4616
.48
1.44

Cp
(Cal/g)
.1394
.2374
.1324
.1610
.1250
.399
.366
.3189
.1270
.1691
.1488
.1592
.1543
.127
.182
.1357
.1380
.161

.508
.120
.163
.3710
.0810
.0888
.1241
.12054
.0378

Density
(g/l)
4.418
1.517
6.843
5.620
6.127
1.967
1.877
1.433
7.580
4.643
2.858
6.516
4.562
4.224
4.64
6.129
6.043
8.36

8.848
8.465
5.95
2.639
13.28
15.70
4.772
2.788
5.858

APPENDIX IV - Component Diagram

GFM3/4 Analog PC Board TOP

Page 20

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