5 description – Ocean Optics PlasCalc User Manual
Page 7
Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology
4
5 Description
With its high resolution miniature fiberoptic spectrometer equipped with a 2048 pixel
CCD and fast acquisition electronics, the PlasCalc acquires plasma light emission
from 200 to 1100 nm in 3 ms. The well engineered PlasCalc process control system
brings the benefits of sophisticated algorithms for data acquisition and signal
treatment. The analog-digital output and input capabilities gives together with full
PC connectivity all options to control the process.
System Setup:
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