Ocean Optics PlasCalc - Manual (Page 5)

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 2
3 Introduction
Ocean Optics PlasCalc
Process control is essential in industrial plasma applications to ensure reliability and high quality of
the process. For this purpose optical emission spectroscopy (OES) is an excellent tool since this
technique does not affect the plasma and several plasma species can be monitored in real-time
and in-situ.
The Ocean Optics PlasCalc system is designed especially for industrial applications where a
robust set-up and an easy-to-use software are required. The Ocean Optics PlasCalc software is
an easy-to-use Windows
® software which can be run interactively for research purposes as well as
stand-alone for process monitoring and controlling. The software can be configured for the use by
technical personal.
Enjoy working with this powerful OES system.
Ocean Optics Germany GmbH