Characteristics, Measurement range and accuracy, Ls-9006d – KEYENCE LS-9030D User Manual
Page 4: Ls-9030d, Temperature characteristics
4
E LS-9006D/LS-9030D
Characteristics
Measurement range and accuracy
z
LS-9006D
* Zero point is the intersection of the optical center of each X and Y axis
measurement range.
z
LS-9030D
* Zero point is the intersection of the optical center of each X and Y axis
measurement range.
Temperature characteristics
The following shows the typical examples of the temperature characteristics.
z
LS-9006/LS-9006M/LS-9006D
(X-axis, Y-axis)
Unit: μm
φ
z
LS-9030/LS-9030M/LS-9030D
(X-axis, Y-axis)
Unit: μm
φ
Zero point
*1
180
89
±1.5
μm
±0.5
μm
Y-axis head
receiver
X-axis head
receiver
±0.5
±0.5
2
4
2
4
6
6
X-axis
measurement area
Y-axis
measurement area
Unit: mm
Temperature
0
°
C
10
°
C
20
°
C
30
°
C
40
°
C
50
°
C
Drift
-0.18
-0.06
0.00
0.08
0.12
0.19
Temperature
0
°
C
10
°
C
20
°
C
30
°
C
40
°
C
50
°
C
Drift
0.28
0.14
0.00
-0.07
-0.25
-0.4
200
145
±0.5
±0.5
10
20
10
20
±5
μm
±2
μm
Zero point
*1
Y-axis head
receiver
X-axis head
receiver
X-axis
measurement area
Y-axis
measurement area
30
30
Unit: mm