Brooks Instrument 5851i - Manual (Page 9)

1-3
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Brooks ® Model 5851 i
Section 1 Introduction
1-3 Specifications
Standard Ranges
Any full scale flow rate from 10 slpm to 100 slpm (nitrogen equivalent); up
to 200 slpm hydrogen.
Accuracy
±1% full scale including linearity at calibration conditions
Repeatability
0.25% of rate
Response Time
Less than 6 seconds response to within 2% of full scale final value with a 0
to 100% command step.
Power Requirements
+22.5 to 28 Vdc — 370 mA @ +28 Vdc
Ambient Temperature Limits
Operating: 5 to 65°C (40 to 150°F)
Non-Operating: -25 to 100°C (-13 to +212°F)
Working Pressure
1500 psi (10.342 MPa) maximum
Differential Pressure
10 to 50 psi. Higher differential pressures are allowable depending on gas
and range. Consult factory for details.
Output Signal
0-5 Vdc into 2,000 ohms or greater. Maximum ripple 3 mV. Jumper
selectable 4-20 mAdc or 0-20 mAdc. Refer to Fig. 2-3 for maximum
total loop resistance.
5 Volt Reference Output
5 Volts ±0.2%. Maximum load 1k ohms.
Temperature Sensitivity
Zero: less than ±0.075% full scale per degree C.
Span: less than ±1.0% full scale shift over 10-50°C range
Mounting Attitude Sensitivity
±0.5% maximum full scale deviation after re-zeroing
Command Input
Jumper Selectable: 0-5 Vdc, Input resistance 200k ohm or 4-20 mAdc,
Input resistance 75 ohm