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Brooks, Model 5851 i – Brooks Instrument 5851i User Manual

Page 14

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2-4

Installation and Operation Manual

X-TMF-5851i-MFC-eng

Part Number: 541B109AAG

September, 2009

Brooks

®

Model 5851

i

Section 2 Installation

2-6 In-Line Filter

It is recommended that an in-line filter be installed upstream from the
controller to prevent the possibility of any foreign material entering the flow
sensor or control valve. The filtering element should be replaced
periodically or ultrasonically cleaned.

Table 2-1 Recommended Filter Size

Maximum Flow Rate

Recommended Filter Size

10 to 30 slpm

15 micron

Above 30 slpm

30 micron

NOTE: The above lists the maximum recommended porosity for each flow range. It is
recommended that the minimum micron porosity that does not limit the full scale
flowrate be used.

Figure 2-2 D Connector Shielded Cable Hookup Diagram

15 PIN MALE

D-CONNECTOR

*BROOKS READ OUT MFC / MFM

FUNCTION

WIRE

SIDE SUB D (15 PIN)

PIN

COLOR

6

1

Setpoint, Common Input (-)

BLACK

10

2

Flow Signal, 0(1)-5 volt, Output (+)

WHITE

9

3

NA

RED

2

4

Flow Signal, 0(4)-20 mA, Output (+)

GREEN

13

5

Power Supply, +15 Vdc to +28 Vdc

ORANGE

14

6

NA

BLUE

3

7

Setpoint, 0(4)-20 mA, Input (+)

WHT/BLK

5

8

Setpoint, 0(1)-5 volt, Input (+)

RED/BLK

12

9

Power Supply, Common (-)

GRN/BLK

8

10

Flow Signal, Common, Output (-)

ORG/BLK

4

11

Reference, +5 Vdc, Output (+)

BLU/BLK

7

12

Valve Override, Input

BLK/WHT

1

13

NA

RED/WHT

11

14

Chassis Ground

GRN/WHT

15

15

NA

BLU/WHT

* Brooks Read Out Models 0151, 0152, 0154, 0254