Brooks, Model 5851 i – Brooks Instrument 5851i User Manual
Page 14
2-4
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Brooks
®
Model 5851
i
Section 2 Installation
2-6 In-Line Filter
It is recommended that an in-line filter be installed upstream from the
controller to prevent the possibility of any foreign material entering the flow
sensor or control valve. The filtering element should be replaced
periodically or ultrasonically cleaned.
Table 2-1 Recommended Filter Size
Maximum Flow Rate
Recommended Filter Size
10 to 30 slpm
15 micron
Above 30 slpm
30 micron
NOTE: The above lists the maximum recommended porosity for each flow range. It is
recommended that the minimum micron porosity that does not limit the full scale
flowrate be used.
Figure 2-2 D Connector Shielded Cable Hookup Diagram
15 PIN MALE
D-CONNECTOR
*BROOKS READ OUT MFC / MFM
FUNCTION
WIRE
SIDE SUB D (15 PIN)
PIN
COLOR
6
1
Setpoint, Common Input (-)
BLACK
10
2
Flow Signal, 0(1)-5 volt, Output (+)
WHITE
9
3
NA
RED
2
4
Flow Signal, 0(4)-20 mA, Output (+)
GREEN
13
5
Power Supply, +15 Vdc to +28 Vdc
ORANGE
14
6
NA
BLUE
3
7
Setpoint, 0(4)-20 mA, Input (+)
WHT/BLK
5
8
Setpoint, 0(1)-5 volt, Input (+)
RED/BLK
12
9
Power Supply, Common (-)
GRN/BLK
8
10
Flow Signal, Common, Output (-)
ORG/BLK
4
11
Reference, +5 Vdc, Output (+)
BLU/BLK
7
12
Valve Override, Input
BLK/WHT
1
13
NA
RED/WHT
11
14
Chassis Ground
GRN/WHT
15
15
NA
BLU/WHT
* Brooks Read Out Models 0151, 0152, 0154, 0254