Brooks Instrument 5851i - Manual (Page 13)

2-3
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Brooks ® Model 5851 i
Section 2 Installation
Recommended installation procedures:
a. The Model 5851 i should be located in a clean dry atmosphere rela-
tively free from shock and vibration.
b. Leave sufficient room for access to the electrical components.
c. Install in such a manner that permits easy removal if the instrument
requires cleaning.
d. The Model 5851 i Mass Flow Controller can be installed in any
position. However, mounting orientations other than the original
factory calibration (see data sheet) will result in a ±0.5% maximum
full scale shift after re-zeroing.
e. When installing controllers, be aware that sharp abrupt angles in the
system piping directly upstream of the controller may cause a small
shift in accuracy. If possible, have at least ten pipe diameters of
straight tubing upstream of the 5851
i mass flow controller.
NOTE: The control valve in the Model 5851 i provides precision control
and is not designed for positive shut-off. If positive shut-off is required, it is
recommended that a separate shut-off valve be installed in-line.
Figure 2-1 Model 5851 i Dimensions
Connection "X" Dim.
1/4" Compression 5.70
Fitting 145
1/4" Tube VCO 5.22
133
1/4" Tube VCR 5.56
141
3/8" Compression 5.82
Fitting 148
1/2" Tube VCO 5.48
139
1/2" Tube VCR 5.86
149