Brooks Instrument 5851i - Manual (Page 6)

ii
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Brooks ® Model 5851 i
Figures
Figure Page
1-1 Command Steps, Soft Start Disabled ................................. 1-2
1-2 0-100% Command Step, Soft Start Enabled ...................... 1-2
2-1 Model 5851i Dimensions ................................................... 2-3
2-2 D Connector Shielded Cable Hookup Diagram .................. 2-4
2-3 Maximum Allowable Loop Resistance ............................... 2-5
2-4 Common Electrical Hook-Ups, Voltage I/O Version ........... 2-6
2-5 Recommended I/O Wiring Configuration for Current Signals
(Non-Isolated Power Supply) ............................................. 2-7
2-6 Recommended I/O Wiring Configuration for Current Signals
(Isolated Power Supply) ..................................................... 2-7
3-1 Flow Sensor Operational Diagram ..................................... 3-2
3-2 Flow Control System Block Diagram ................................. 3-3
3-3 PC Board Jumper Location & Function .............................. 3-7
3-4 Model 5851i Calibration Connections ................................ 3-8
3-5 Adjustment Potentiometer Location ................................... 3-8
3-6 Fast Response Adjustment ................................................ 3-9
4-1 Torque Sequence for the Valve Retainer Plate .................. 4-3
4-2 Valve Adjusting Spacer Locations ...................................... 4-5
4-3 Voltmeter Connections for Valve Adjustment ..................... 4-7
4-4 Example Nomograph ........................................................ 4-16
4-5 Model 5851i Orifice Sizing Nomograph ............................. 4-17
4-6 Model 5851i Restrictor Element Assembly ........................ 4-18
4-7 Model 5851i Restrictor Element Orientation in
Controller Body ................................................................. 4-18
5-1 Model 5851i Parts Drawing ................................................ 5-2
Tables
Table Page
2-1 Recommended Filter Size ................................................. 2-4
4-1 Bench Troubleshooting ...................................................... 4-2
4-2 Sensor Troubleshooting ..................................................... 4-4
4-3 Conversion Factors (Nitrogen Base) ................................. 4-12
5-1 Model 5851i Replacement Parts List ................................. 5-3
5-2 Tool and Spare Part Kits for 5850 Series ........................... 5-4