Brooks, Model 5851 i – Brooks Instrument 5851i User Manual
Page 10
1-4
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Brooks
®
Model 5851
i
Section 1 Introduction
Leak Integrity
1 x 10
-9
Atm. scc/sec Helium
Control Range
50 to 1
Mechanical Connection
Interchangeable with most popular mass flow controllers.
Refer to Figure 2-1.
Electrical Connection
D-Type, 15-pin connector (DA-15P). Mating connector supplied.
*Standard temperature and pressure in accordance with SEMI
(Semiconductor Equipment and Materials International) standard: 0°C and
101.3 kPa (760 Torr). The mass flow controller can be calibrated to other
reference standard conditions. Specify at time of ordering.
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