Brooks, Model 5851 i – Brooks Instrument 5851i User Manual
Page 53
5-3
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Brooks
®
Model 5851
i
Section 5 Parts List
Table 5-1 Model 5851
i Replacement Parts List (Continued on next page)
Item
No.
Quantity
Description
Part Number
1
1
Jam Nut
573B027ACK
2
1
Coil Assembly
S185Z271AAA
3
4
Screw, Valve
751C322AWA
4
1
Retaining Plate
715Z169CZ%
5
1
O-Ring, Valve Stem, Size 016
375B016***
6
1
Valve Stem, High Flow
949Z203QOA
6A
1
Valve Plug
953Z068BMT
6B
1
Valve Ring
763Z064***
6C
1
Valve O-Ring
375B016***
7
1
Valve Plunger Assembly, High Flow
S622Z165AAA
8
1
Lower Guide Spring
820Z083BMA
9
AR
Small Valve Spacer, 0.005" Thick
810A362BMA
Small Valve Spacer, 0.010" Thick
810A363BMA
10
AR
Large Valve Spacer, 0.005" Thick
810A368BMA
Large Valve Spacer, 0.010" Thick
810A361BMA
11
1
Valve Seat with Viton
TM
Insert
S715Z051AAG
Valve Seat with Buna Insert
S715Z050AAG
Valve Seat with Kalrez
TM
Insert
S715Z163AAA
Valve Seat Solid 316 Stainless Steel
715Z181BNT
12
1
Orifice, Stainless Steel
ID 0.0040"
577Z275BMT
ID 0.0067"
577Z277BMT
ID 0.0091"
577Z280BMT
ID 0.0120"
577Z283BMT
ID 0.0160"
577Z286BMT
ID 0.0210"
577Z289BMT
ID 0.0260"
577Z293BMT
ID 0.0310"
577Z296BMT
ID 0.0360"
577Z300BMT
ID 0.0410"
577Z305BMT
ID 0.0465"
577Z308BMT
ID 0.0550"
577Z310BMT
(Refer to Section 4-6
ID 0.0635"
577Z312BMT
for sizing)
ID 0.0700"
577Z314BMT
ID 0.0760"
577Z316BMT
ID 0.0820"
577Z319BMT
ID 0.0935"
577Z322BMT
ID 0.1065"
577Z328BMT
ID 0.1200"
577Z333BMT
ID 0.1405"
577C336BMT
13
1
O-Ring, Orifice, Size 0011
375B011***
14
1
Controller Body
S854Z157BMA
15
1
PC Board Assembly (D-Connector)
S097Y901AAA
16
1
Sensor Assembly
S774Z607AAA
17
2
O-Ring, Sensor, Size 004
375B004***
18
2
Allen Nut, Sensor-Body
753Q103ACZ
19
2
Lock Washer, Sensor
962D005AWA
20
5
Screw, Sensor-PC, Board-Cover
753L056AWZ
21
1
Restrictor Assembly and Components (Refer to Section 4-7 for sizing)
22
1
O-Ring, Restrictor, Size 026
375B026***
23
1
Electronics Cover Can (D-Connector)
219Z431EA%
23A
1
Cover Plate (D-Connector)
852Z209EA%
24
1
PC Board Mounting Bracket
079Z135EAA
26
2
Pot Hole Plug
620Z434SXA
***
QTA = Viton
TM
, SUA = Buna, TTA = Kalrez
TM
AR
As required,
NS
Not Shown