Brooks Instrument QMBM - Manual (Page 17)

QmB Series IP40, IP66, IP66XP
Section 1 Introduction
1-5
Installation and Operation Manual
X-CM-QmB-eng
Part Number: 541B029AAG
June, 2011
0.1
1.0
10.0
100.0
100 1,000 10,000 100,000
Mass Flow (sccm)
Pr
essur
e
D
rop (
p
si
)
Tube Size 2
Tube Size 3
Tube Size 4
Pressure Drop Air @ 500 psi Inlet Pressure
Density (10) :
Range: 0.2 to 2.0 grams/cc
Accuracy: ±0.005 grams/cc
Repeatability: ±0.002 grams/cc
Temperature (11)
Device Temperature Range: 0 to 65°C or 32 to 149°F
Accuracy: ± 0.5°C or ± 1.0°F
Notes
(1) QMBC - Brooks Quantim controller with integral control valve. QMBM - Brooks Quantim meter (no valve).
(2) The nominal flow rate is the flow rate at which water at reference conditions causes approximately 1 bar of
pressure drop or the laminar to turbulent transition flow whichever is lower. Maximum flow rate is twice nominal
flow rate or the laminar to turbulent transition flow whichever is lower.
(3) Standard volumetric conditions are 14.696 psia and 70°F.
(4) Actual volumetric flow is a function of the mass flow and density measurements; Therefore, the accuracy of the
actual volumetric flow is a function of the mass flow and density accuracy.
(5) ml
n
/min Reference Conditions 0 o C at 1013.25 mbar.
(6) Accuracy includes combined repeatability, linearity, and hysteresis. Specifications are based on reference test
conditions of water/nitrogen at 68 to 77°F (20 to 25°C) and 15 to 30 psig (1 to 2 bar).
(7) Repeatability- The maximum difference between output readings when the same input is applied consecutively;
the closeness of agreement among consecutive measurements of an output for the same value of input under
the same operating conditions, approaching from the same direction.
(8) Helium leak and pressure test of elastomer sealed devices is performed with integral 5/16" -24 UNF connection.
(9) Differential pressures are based on reference conditions of water and air at 68 to 77°F (20 to 25°C).
(10) For applications with fluid density in the range from 0.3 to 0.5 grams/cc the device may be sensitive to 50Hz or
60Hz vibration. The density measurement at temperatures other than 21° C (70° F) has an additional error of
approximately 0.0005 grams/cc per deg C. The density output signal is available below 0.2grams/sec. The
density accuracy is applicable over the stated density range.