Brooks Instrument QMBM - Manual (Page 15)

QmB Series IP40, IP66, IP66XP
Section 1 Introduction
1-3
Installation and Operation Manual
X-CM-QmB-eng
Part Number: 541B029AAG
June, 2011
100
1,000
10,000
100,000
50 100 200 500 1000 1500
Inlet Pressure (psig)
Fl
o
w
ra
te
(
s
c
c
m
)
Size 2 Controller
Size 3 Controller
Size 4 Controller
Size 2 Meter
Size 3 Meter
Size 4 Meter
Accuracy (6)
+ measurement accuracy % of rate or [(zero stability/flowrate) x 100] % of rate, which ever is greater
Measurement Accuracy
Zero Stabilities
Standard Measurement Accuracy vs Flow Rate Chart, Tube Size 2
Gas Flow Limits
Air, 70
o F (21 o C), 14.5 psi (1 bar) pressure drop
Sensor Tube
Material Fluid Type
Standard Flow
Measurement
Accuracy (% of rate)
Optional Flow
Measurement
Accuracy (% of rate)
Liquid 0.2% 0.5%
Gas 0.5% 1.0%
Liquid 0.5% 1.0%
Gas 0.5% 1.0%
Stainless
Steel
Hastelloy
Sensor Tube
Material Tube Size
Zero Stability
(Kg/hr)
Zero Stability
(Lb/hr)
2 0.00013 0.0003
3 0.0010 0.0022
4 0.0040 0.0088
2 0.0002 0.0004
3 0.0015 0.0033
4 0.0120 0.0265
Stainless Steel
Hastelloy