Brooks Instrument QMBM - Manual (Page 14)

QmB Series IP40, IP66, IP66XP
Section 1 Introduction
1-2
Installation and Operation Manual
X-CM-QmB-eng
Part Number: 541B029AAG
June, 2011
1-3 Performance Specifications
Performance Specifications:
Flow:
Liquid Flow Specifications, English Units (9)
Gas Flow Specifications
Flow rates that produce approximately 14.5 psig (1bar) pressure drop on air at 70
o F (21 o C)
with an inlet pressure of 500 psi (35 bar)
Liquid Flow Specifications, Metric Units (9)
Maximum Flow
Rate
(2)
Nominal Flow
Rate
(2)
Minimum Full
Scale
Minimum
Measurable
Flow
Kg/hr or l/hr Kg/hr or l/hr Kg/hr or l/hr Kg/hr or l/hr
2 0.30 0.15 0.01 0.001
QMBC 3 1.00 0.78 0.10 0.010
4 15.94 7.97 1.00 0.100
2 0.38 0.19 0.01 0.001
QMBM 3 1.00 1.00 0.10 0.010
4 27.00 13.50 1.00 0.100
Product
Type
Quantim
Model
(1)
Quantim
Tube Size
Controller
Meter
Minimum
Measurable
Flow
lb/hr gal/hr lb/hr gal/hr lb/hr
2 0.66 0.08 0.33 0.04 0.002
QMBC 3 2.21 0.26 1.72 0.21 0.022
4 35.15 4.21 17.57 2.11 0.221
2 0.84 0.10 0.42 0.05 0.002
QMBM 3 2.21 0.26 2.21 0.26 0.022
4 59.54 7.13 29.77 3.57 0.221
Maximum Flow Rate
(2)
Nominal Flow rate
(2)
Product
Type
Quantim
Model
(1)
Quantim
Tube Size
Controller
Meter
lb/hr Kg/hr scfh
(3)
sccm
(3)
ml/min
(5)
2 0.168 0.076 2.227 1051 975.2
QMBC 3 0.472 0.214 6.261 2955 2743
4 3.960 1.796 52.52 24787 23009
2 0.227 0.103 3.034 1432 1329
QMBM 3 0.893 0.405 11.86 5595 5193
4 8.476 3.840 112.6 53116 49319
Nominal Volume Flow Rate Nominal Mass Flow Rate
Quantim
Tube Size
Controller
Meter
Product
Type
Quantim
Model
(1)