Brooks Instrument QMBM - Manual (Page 16)

QmB Series IP40, IP66, IP66XP
Section 1 Introduction
1-4
Installation and Operation Manual
X-CM-QmB-eng
Part Number: 541B029AAG
June, 2011
Repeatability (7) :
± 0.05% or ± [0.5 x (zero stability/flowrate) x 100]% of rate whichever is greater
Device Leak Integrity (8) :
Elastomer Sealed Device: Outboard 1 x 10 -9 atm. cc/sec., helium (maximum)
Metal Sealed Device: 1 x 10 -10 atm. cc/sec., helium (maximum)
Turn Down:
Controller: 100:1 or down to the minimum measurable flow, whichever flow rate is greater
Meter: to minimum measurable flow
Settling Time:
Controller (Stainless Steel sensor tube): Less than 2 seconds within 2 % full scale of final
value, ± [(zero stability/flowrate) x 100]% of rate per SEMI Guideline E17-91
Controller (Hastelloy sensor tube): Less than 12 seconds within 2 % full scale of final
value per SEMI Guideline E17-91
Meter: Less than 0.5 seconds within 2 % full scale of final value, ± [(zero stability/flowrate)
x 100]% of rate per SEMI Guideline E17-91
Maximum Operating Pressure (8) :
Standard: 3.5 MPa, 35 bar or 500 psi
Optional: 10 MPa, 100 bar or 1500 psi
Optional: 30 MPa, 300 bar or 4500 psi (Hastelloy sensor tube only)
0.1
1.0
10.0
100.0
10 100 1,000 10,000 100,000
Mass Flow (grams/hr)
Pressu
re Drop (psi)
Tube Size 2
Tube Size 3
Tube Size 4
Differential Pressures , Meter (9)
Pressure Drop Liquid - (H
2
0)
Differential Pressure Requirements, Controller (9) :
Liquid Gas
Quantim Quantim KpA bar psi KpA bar psi
Model (1)
Tube Size min max* min max* min max* min max* min max* min max*
2 69 1034 0.7 10.3 10 150 69 1724 0.7 17.2 10 250
QMBC 3 69 1379 0.7 13.8 10 200 69 1034 0.7 10.3 10 150
4 69 1379 0.7 13.8 10 200 69 1034 0.7 10.3 10 150
* Actual maximum pressure drop will depend on process conditions and orifice selection.