GE P&W Ultrapure and Drinking Water TOC Analyzers - Sievers 500 RLe Brochure - Manual

Fact Sheet
GE Power & Water
Water & Process Technologies
Analytical Instruments
Sievers 500 RL e
On-Line TOC Analyzer
Advancing the science of ultra low-level TOC
measurement in microelectronics applications
Overview
The Sievers* 500 RL e On-Line TOC Analyzer is the
semiconductor industry’s only on-line, reagentless TOC
analyzer capable of accurately detecting problematic
compounds such as urea, trimethylamine (TMA),
organic acids and organic bases.
An on-line Total Organic Carbon (TOC) analyzer should
be as simple as possible, but not so simple that it
exposes the fabrication operations to unacceptable
risks associated with undetected organic transients.
Recently the leading global semiconductor immersion
tool manufacturer has required all TOC measurements
of the water feeding their tools to include the accurate
measurement of organic nitrogen compounds in the
ultrapure water (UPW). 1 Some brands of TOC analyzers
are simply not able to measure commonly present
organic nitrogen compounds such as urea or TMA in
the UPW. 1,2 The 500 RL e accurately and reproducibly
measures them to meet this new TOC performance
requirement.
The 500 RL e uses GE Analytical Instruments’ proprietary
membrane conductometric technology, delivering ultra
low-level accuracy and reliability by eliminating false
positive and false negative readings associated with
other simplified TOC technologies (see Figures 1 and 2).
The 500 RL e automatically exhibits the best-in-
class Instrument-to-Instrument matching and the
lowest Limit of Detection (LOD) for reagentless
online semiconductor UPW TOC analyzers. Five
500 RL e Analyzers were placed on the same major
semiconductor companies’ 0.3 ppb C UPW and data
was collected for two months. The large data set
showed that 91% of all the Instrument-to-Instrument
TOC readings were within ± 0.05 ppb C. Additionally
44,272 LOD analyses were performed on the same five
analyzers, and 98% of the time the TOC LOD was less
than 0.02 ppb C (see Figures 3 and 4). It is notable that
this performance is achieved automatically without
the need to do manual re-calibration operations or
to send the analyzer offsite for special calibrations, as
often required by other TOC sensors.
Design enhancements allow the 500 RL e to operate
on higher conductivity waters than the PPT while still
delivering the same analytical performance. As a result,
the 500 RL e offers greater versatility and reliability.
Specific attention has been paid to performance on
low dissolved oxygen (DO) water systems, resolving
TOC recovery issues that are problematic for other
reagentless TOC analyzers.
Applications
Microelectronics Ultrapure Process Waters
The 500 RL e Analyzer’s remarkable Instrument-
to-Instrument matching allows you to confidently
compare TOC results between different water loops
in your factory and around the world. The very high
sensitivity, as demonstrated by the LOD, allows you to
see the smallest change in your system before it gets
out of control.
For the most advanced state-of-the-art chip
manufacturing facilities’ requirements, there is never
a question about unmeasured organics that may be