INFICON RSH-600 Rotary Sensor - Manual (Page 9)

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RSH-600 Operating Manual
Chapter 1
Introduction
1.1 Introduction
The RSH-600 rotary sensor, see Figure 1-1 , is designed for the most demanding
processes employing very thick films and several different materials. Switching the
crystal without venting the system makes it possible to run automatically with
continuous deposition. The fixed position of the crystal being measured also makes
it unnecessary to change the tooling factor.
The RSH-600 can be used to deposit a different material on each of six crystals
providing greater measurement accuracy. Upon completion of deposition of one
material, the deposition controller may be programmed to switch crystals for the
next material. It may also be actuated manually.
The RSH-600 sensor holds six crystals in a thermally shielded, water cooled
housing, insuring excellent crystal performance in temperature environments up to
300ºC. Crystals are housed in an easily removable Teflon
® and stainless steel
crystal holder.
Crystal position is incremented by applying a one second pulse to a 110/115 V (ac)
or 24 V (dc) pneumatic valve. A 7-pin connector provides an indication of the
number of the active crystal. This may be used to interface with a thin film controller
for automatic crystal switching operation. Refer to your controller operating manual
for programming instructions.
Figure 1-1 RSH-600 and Sensor Head Options