INFICON RSH-600 Rotary Sensor - Manual (Page 24)

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IPN
1
5
3800
-G
RSH-600 Operating Manual
3. Crystal not centered in
aperture. a. Improper alignment. a. The RSH-600 should
realign automatically. Be
sure the correct air pressure
(55 psi) is used. Contact
INFICON if the issue
persists.
4. Large jumps of thickness
reading during deposition. a. Mode hopping. a. Mode hopping is a by
product of active oscillation
with a heavily damped
crystal. Temperature
stabilization is key in
diminishing this. Replace the
crystal.
b. Crystal near the end of its
life. b. Replace crystal.
c. Scratches or foreign
particles on the crystal holder
seating surface. c. Clean, polish the crystal
seating surface of the crystal
holder.
d. Insufficient crystal cooling. d.Check water flow and
temperature.
5. Crystal ceases to oscillate
during deposition before it
reaches its "normal" life. a. Crystal is being hit by small
droplets of molten material
from the evaporation source. a. Move the sensor further
away from the evaporant.
b.Damaged crystal. b. Replace crystal.
c. Deposition material
built-up on the edge of the
crystal carousel aperture
plate and touching the
crystal, partially masking full
crystal area. d. Clean the crystal carousel
aperture plate.
6. Crystal does not oscillate
or oscillates intermittently.
(both in vacuum and in air) a. Defective or damaged
crystal. a. Replace crystal.
b. Existence of electrical
short or poor electrical
contacts. Check for electrical continuity
and short in sensor cable,
electrical connection
assembly, feedthroughs, and
crystals carousel.
d. Insufficient crystal cooling. d.Check water flow and
temperature.
Table 3-1 General Troubleshooting (continued)
SYMPTOM CAUSE REMEDY