INFICON RSH-600 Rotary Sensor - Manual (Page 17)

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RSH-600 Operating Manual
Chapter 2
Installation
CAUTION
During installation, special care must be taken to protect
the barrel surface from being damaged. Scratches or
gouges may prevent the RSH-600 from forming a good
vacuum seal to the O-ring.
Successful operation of any crystal sensor depends on proper placement,
compatibility of its construction with its operating environment and connection to
proper utilities.
NOTE: The RSH-600 should be clean and grease free when installed in the
vacuum chamber. The sensor should be handled while wearing clean
nylon gloves. If parts do become contaminated, clean them thoroughly
using a suitable solvent to avoid outgassing and excessive peeling of
deposition material from the sensor’s surfaces.
2.1 Crystal Sensor Installation
Generally, install the sensor as far as possible from the evaporation source (a
minimum of 12 in. or 30.5 cm) while still being in a position to accumulate thickness
at a rate proportional to accumulation on the substrate.
Figure 2-1 shows proper
and improper methods of installing sensors.
Figure 2-1 Sensor Installation Guidelines