INFICON Ecotec E3000 Multigas-Sniffer-Leak Detector Interface description User Manual
Page 21
3 RS-232 interface
21
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:TURBO
operating hours turbo pump [h]
R
*MEASure
R
:Argon
R
:Current
current for Argon [A]
R
:Position
mass position for Argon [amu]
R
:FLOW
actual flow [sccm]
R
:GLOBal
I•Guide trigger level of global leak rate exceeded
(Gas A / B
2 values)
R
:POInt no
I•Guide measuring value [in selected unit] for
measuring point no (1, 2,…)
(Gas A / B
2 values)
R
[TIMEstamp
(Gas A / B
2 values)
R
:Pressure
R
:FOREline
foreline pressure [in selected unit of measurement]
R
:TOTal
total pressure (Transpector) [Torr]
R
:TEMPeratur
R
:Electronic
electronics temp. [°C]
R
:Leak
ECO-Check temp. [°C]
R
:Tsp
Transpector temp. [°C]
R
:TspMIN
Transpector temp. minimum [°C]
R
:TspMAX
Transpector temp. maximum [°C]
R
:TCElectronic
temperature of the turbo controller electronic
R
:TCBearing
temperature of the turbo pump bearings
R
:TCMotor
temperature of the turbo pump motor
R
:TCPump
temperature of the turbo pump
R
:TURBO
R
:Current
current of TMP [A]
R
:Frequency
frequency of TMP [Hz]
R
:Power
power of TMP [W]
R
:Voltage
voltage of TMP [V]
R
*PROGram
I•Guide
:1
:2
…
:10
use of I•Guide: Program number
without a number the current program is used
-
:ENABle
enable (ON, OFF) (will be added to list of selectable
program when ON)
R/S
:GAS
:GASA
Gas name (A)
(read only, determined by gas number)
R
:GASB
Gas name B
(read only, determined by Gas num B)
R
:MEAStime
Measuring time [s] (1.0, 1.1, … 25.0)
R/S
Table 11: List of commands, ASCII (cont.)
Command
word1
Command
word2
Command
word3
Statement
Read/Set