INFICON T-Guard Leak Detection Sensor - Manual (Page 19)

Description
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In FINE measurement mode, V1 and V2 are open, V3 is closed (see Fig. 4-9 ). The
sensor receives only gas from the measurement inlet and shows the highest sensi-
tivity to helium from the measurement line.
Fig. 4-9 Valve configuration in FINE mode
Item Description Item Description
1 Inlet “IN” 8 Pressure gauge p1
2 Reference “Ref” 9 Pump
3 Filter 2 10 Pump connector “OUT”
4 Valve V
3
11 Throttle 3
5 Valve V
2
12 Throttle 1
6 Throttle 2 13 Valve V
1
7 Wise Technology™ Sensor 14 Filter 1