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INFICON T-Guard Leak Detection Sensor User Manual

Page 19

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Description

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In FINE measurement mode, V1 and V2 are open, V3 is closed (see

Fig. 4-9

). The

sensor receives only gas from the measurement inlet and shows the highest sensi-
tivity to helium from the measurement line.

Fig. 4-9 Valve configuration in FINE mode

Item

Description

Item

Description

1

Inlet “IN”

8

Pressure gauge p1

2

Reference “Ref”

9

Pump

3

Filter 2

10

Pump connector “OUT”

4

Valve V

3

11

Throttle 3

5

Valve V

2

12

Throttle 1

6

Throttle 2

13

Valve V

1

7

Wise Technology™ Sensor

14

Filter 1