INFICON T-Guard Leak Detection Sensor - Manual (Page 18)

16
Description
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In the rare event that the sensor is contaminated with helium, only the valve V3 to the
reference inlet "Ref" is open, to purge the sensor. In this case, highly pure nitrogen
or external air has to be led to the reference inlet to decontaminate the sensor as fast
as possible.
Fig. 4-8 Valve configuration during decontamination
Item Description Item Description
1 Inlet “IN” 8 Pressure gauge p1
2 Reference “Ref” 9 Pump
3 Filter 2 10 Pump connector “OUT”
4 Valve V
3
11 Throttle 3
5 Valve V
2
12 Throttle 1
6 Throttle 2 13 Valve V
1
7 Wise Technology™ Sensor 14 Filter 1