INFICON T-Guard Leak Detection Sensor - Manual (Page 15)

Description
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3.3 Vacuum diagram
On top of the vacuum diagram, there are the measurement inlet "IN" and the
reference inlet "Ref". Both inlets are equipped with an external filter to protect T-
Guard™ Leak Detection Sensor from sucking in dust or fluids. Three valves are
integrated in the T Guard™ Leak Detection Sensor (see
Fig. 4-5 ).
Valve V1 opens and closes the measurement inlet. Valve V3 opens and closes the
reference inlet. Valve V2 opens and closes the connection between V1 and V3.
These three valves are connected to two flow-restricted capillaries which lead to the
Wise Technology™ Sensor.
The upper inlet of the Wise Technology™ Sensor is the fine inlet, the lower one is
the gross inlet, which is less sensitive to helium than the fine inlet.
The Wise Technology™ Sensor detects the helium in the gas stream, which passes
by. The total pressure, which is applied to the Wise Technology™ Sensor is detected
by the Pressure Gauge p1.
The fore pump, which provides the gas stream inside T-Guard™ Leak Detection
Sensor is also throttled to produce constant pressure and flow for the Wise Techno-
logy™ Sensor.
Fig. 4-5 Vacuum diagram of the T-Guard™ Leak Detection Sensor
Item Description Item Description
1 Inlet “IN” 8 Pressure gauge p1
2 Reference “Ref” 9 Pump
3 Filter 2 10 Pump connector “OUT”
4 Valve V
3
11 Throttle 3
5 Valve V
2
12 Throttle 1
6 Throttle 2 13 Valve V
1
7 Wise Technology™ Sensor 14 Filter 1