Brooks Instrument 5851EM - Manual (Page 7)

1-1
Brooks ® Models 5965, 5851EM
Section 1 Introduction Installation and Operation Manual
X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009
1-1 How to Use This Manual
This instruction manual is intended to provide the user with all the
information necessary to install, operate and maintain the
Brooks
® Models 5965 and 5851EM
This manual is organized into the following sections:
Section 1. Introduction
Section 2. Installation
Section 3. Operation
Section 4. Maintenance & Troubleshooting
Section A CE Certifications
Back Cover Warranty, Local Sales/Service Contact Information
1-2 Description
The Brooks Model 5965 and 5851EM Mass Flow Controllers are used in
gas flow handling systems where very low leakage and high performance
are required. Models 5965 and 5851EM incorporate metal seals or welded
joints, insuring leak integrity for high purity and high vacuum applications.
Reducing the amount of internal threads makes the design less prone to
system contamination. The control electronics and flow sensor designs
utilized in the Model 5965 and 5851EM have been well-proven in precision
gas delivery systems. Standard features include:
• High leak integrity (less than 10 -10 atm-cc/sec He)
• Enhanced process (7 Ra) internal surface finish (standard for 5965)
• Electropolished wetted surfaces (standard for 5965)
• Vented-polished internal threads
• Wide flow range (10 slpm through 100 slpm)
• Insensitive to mounting attitude
• Full penetration welded fittings
• Negligible flow overshoot/undershoot
• Mechanically and electronically compatible with other mass flow
controllers
• Available with all popular process connections
• Current (4-20 mA) input/output (optional)
• Normally open valve (optional)