Brooks – Brooks Instrument 5851EM User Manual
Page 5
i
Brooks
®
Models 5965, 5851EM
Contents
Installation and Operation Manual
X -TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009
Paragraph
Page
Number
Number
Section 1 Introduction
1-1
How to Use This Manual ............................................................................................................ 1-1
1-2
Description ................................................................................................................................. 1-1
1-3
Specifications ............................................................................................................................. 1-3
Section 2 Installation
2-1
General ...................................................................................................................................... 2-1
2-2
Receipt of Equipment ................................................................................................................. 2-1
2-3
Recommended Storage Practice ............................................................................................... 2-2
2-4
Return Shipment ........................................................................................................................ 2-2
2-5
Transit Precaution ...................................................................................................................... 2-3
2-6
Removal from Storage ............................................................................................................... 2-3
2-7
Gas Connections ........................................................................................................................ 2-3
2-8
In-Line Filter ............................................................................................................................... 2-4
2-9
Installation .................................................................................................................................. 2-4
2-10
Electrical Interface ...................................................................................................................... 2-6
2-11
Configuring the PC Board ......................................................................................................... 2-10
Section 3 Operation
3-1
Theory of Operation ................................................................................................................... 3-1
3-2
Operating Procedure .................................................................................................................. 3-2
3-3
Zero Adjustment ......................................................................................................................... 3-3
3-4
Calibration Procedure ................................................................................................................ 3-5
3-5
Response .................................................................................................................................. 3-10
Section 4 Maintenance & Troubleshooting
4-1
Overview .................................................................................................................................... 4-1
4-2
Troubleshooting .......................................................................................................................... 4-2
4-3
Gas Conversion Factors ............................................................................................................ 4-6
4-4
Orifice Sizing ............................................................................................................................. 4-10
4-5
Restrictor Sizing ........................................................................................................................ 4-15
Section A CE Certificate
CE Certificate of Mass Flow Equipment ................................................................................................ A-1
Warranty, Local Sales/Service Contact Information ....................................................................... Back Cover