Appendix, Appendix a - specifications, Appendix a – MicroE OPS Series User Manual
Page 19: Specifications
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Page 19
Appendix A
Specifications
Agency Standards Conformance: In accordance with
Electromagnetic Compatibility Directive 2004/108/EC:
EN 55011:2007
EN 61000-4-2, -3, -4, -6
Shock
300G 0.5 ms half sine
Vibration
30G at 17Hz
Sensor Cable
Double Shield
(contact MicroE Systems for applications >5m)
Diameter 3.6mm (0.142")
Flex Life 20x10
6
cycles @ 20mm bending radius
Standard 15 pin D-sub connector
Outputs
Digital A-quad-B, 1LSB index pulse, left and right limits. A, B
and I signals are differential. Limits are single ended. Index is
gated to AB high.
Signal Level
A/B/I (differential): RS-422 compatible
Limits: 3.3VDC max., LVTTL compatible (High>2.4VDC, Low
<0.4VDC), maximum current output (source and sink): 14mA
Limits programmable as active high, active low or disabled
Alarm: Tri-state of A, B and I outputs, latched for minimum 30ms
Operating and Electrical Specifications
Power Supply
5VDC +5% @ 120mA when used with
recommended termination, 80mA unterminated
Temperature
Operating
0 to 70
o
C
Storage
-20 to 85
o
C
Humidity
10 to 90% RH non-condensing
A
B
I
Quadrature and Index
* With reference to the sensor‘s optical centerline (see
interface drawings).
Limits
0.6mm
± 0.3*
0.6mm
± 0.3*
Right Limit Out
Pin 10
³ 5mm
³ 5mm
Left Limit Marker
Right Limit Marker
Left Limit Out
Pin 11
Pins 14 & 6
Pins 13 & 5
Pins 12 & 4
Accuracy
Linear Tape Scale
Typical slope error: 100ppm
- Linearity: ±5µm/m
1
- Cyclical (interpolation) error: ±40nm
2
Linear Glass Scale
±3µm/m total
- Cyclical (interpolation) error: ±25nm
2
Rotary Glass Scale 3.9 arc-sec with 64mm OD scale
3
- Cyclical (interpolation) error: ±0.2 arc-sec
2
1 Achievable after two-point correction in the customer’s controller.
2 Repeating error over any 20µm movement and does not accumulate.
3 Assumes perfect alignment of scale pattern to axis of rotation.
Note: Accuracy is the maximum error over the specified movement when
compared to a NIST-traceable laser interferometer standard used at 20
o
C.
Sensor Size & Weight (side mount sensor)
Height
Width
Length
0.46 [11.67mm]
0.56 [14.30mm]
1.35 [34.25mm]
Weight
8g (without cable)
Reliability Information
5 Year Expected Reliability >99.8% under normal operating
conditions
Digital Output Signals
Inverse signals are not shown for clarity.
Active low limit configuration is shown.
System
OPS sensors are compatible with:
- PurePrecision™ Marker Tape II and Laser Tape II
- Linear and rotary glass scales
Scale Pitch
20µm
Signal Period
20µm
System Resolution 1µm, 0.5µm, 0.1µm or 50nm
(specify at time of ordering)
Output Frequency (at maximum speed)
OPS 200/400: 16.5Mhz per channel
OPS 40:
5Mhz per channel
OPS 20:
2.5Mhz per channel
Note: Output frequency must not exceed maximum input frequency of customer
electronics.