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Appendix, Appendix a - specifications, Appendix a – MicroE OPS Series User Manual

Page 19: Specifications

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Page 19

Appendix A

Specifications

Agency Standards Conformance: In accordance with

Electromagnetic Compatibility Directive 2004/108/EC:

EN 55011:2007

EN 61000-4-2, -3, -4, -6
Shock

300G 0.5 ms half sine

Vibration

30G at 17Hz

Sensor Cable

Double Shield

(contact MicroE Systems for applications >5m)

Diameter 3.6mm (0.142")

Flex Life 20x10

6

cycles @ 20mm bending radius

Standard 15 pin D-sub connector

Outputs

Digital A-quad-B, 1LSB index pulse, left and right limits. A, B

and I signals are differential. Limits are single ended. Index is

gated to AB high.
Signal Level
A/B/I (differential): RS-422 compatible

Limits: 3.3VDC max., LVTTL compatible (High>2.4VDC, Low

<0.4VDC), maximum current output (source and sink): 14mA

Limits programmable as active high, active low or disabled

Alarm: Tri-state of A, B and I outputs, latched for minimum 30ms

Operating and Electrical Specifications

Power Supply

5VDC +5% @ 120mA when used with

recommended termination, 80mA unterminated

Temperature

Operating

0 to 70

o

C

Storage

-20 to 85

o

C

Humidity

10 to 90% RH non-condensing

A

B

I

Quadrature and Index

* With reference to the sensor‘s optical centerline (see

interface drawings).

Limits

0.6mm

± 0.3*

0.6mm

± 0.3*

Right Limit Out

Pin 10

³ 5mm

³ 5mm

Left Limit Marker

Right Limit Marker

Left Limit Out

Pin 11

Pins 14 & 6

Pins 13 & 5

Pins 12 & 4

Accuracy

Linear Tape Scale

Typical slope error: 100ppm

- Linearity: ±5µm/m

1

- Cyclical (interpolation) error: ±40nm

2

Linear Glass Scale

±3µm/m total

- Cyclical (interpolation) error: ±25nm

2

Rotary Glass Scale 3.9 arc-sec with 64mm OD scale

3

- Cyclical (interpolation) error: ±0.2 arc-sec

2

1 Achievable after two-point correction in the customer’s controller.

2 Repeating error over any 20µm movement and does not accumulate.

3 Assumes perfect alignment of scale pattern to axis of rotation.
Note: Accuracy is the maximum error over the specified movement when
compared to a NIST-traceable laser interferometer standard used at 20

o

C.

Sensor Size & Weight (side mount sensor)

Height

Width

Length

0.46 [11.67mm]

0.56 [14.30mm]

1.35 [34.25mm]

Weight

8g (without cable)

Reliability Information

5 Year Expected Reliability >99.8% under normal operating

conditions

Digital Output Signals

Inverse signals are not shown for clarity.

Active low limit configuration is shown.

System

OPS sensors are compatible with:

- PurePrecision™ Marker Tape II and Laser Tape II

- Linear and rotary glass scales
Scale Pitch

20µm

Signal Period

20µm

System Resolution 1µm, 0.5µm, 0.1µm or 50nm

(specify at time of ordering)

Output Frequency (at maximum speed)
OPS 200/400: 16.5Mhz per channel

OPS 40:

5Mhz per channel

OPS 20:

2.5Mhz per channel

Note: Output frequency must not exceed maximum input frequency of customer

electronics.