Bird Technologies SCC7 Series-Manual - Manual (Page 15)

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Chapter 1 Introduction
This instruction book is intended for use by operators of the Bird Cal Cart System. This chapter contains introductory
information including component descriptions and items supplied.
The Bird Cal Cart is designed for immediate, effortless use. It has three primary components. The Bird 4421 RF Power
Meter displays radio frequency (RF) power. Bird 4020, 4027A, and 4027F Series Power Sensors are highly accurate
sensors that measure RF power without requiring calibration or external couplers or attenuators. Bird Loads are low
reflection 50  terminations that can dissipate 1 kW to 10 kW max., depending on the model. These components
are installed on a cart for easy transportation, and connected so that the only setup required is connecting AC and
RF power. The cart is suitable for use in a cleanroom environment, and is equipped with four swivel casters for max‐
imum maneuverability.
Items Supplied
Stainless Steel Cart with the following items installed:

Bird 4421 RF Power Meter

One Bird 4020, 4027A, or 4027F Series Sensors

Bird Load with Shipping and Vent Plugs

Cabling

Instruction Manual
RF Power Meter
The Bird 4421 RF Power Meter measures forward and reflected RF power when used in conjunction with a Bird
power sensor. Measurements can be made in units of either Watts or dBm. Because of the precision of the attached
load, reflected power will be negligible and can usually be ignored.
Note: The 4421 is equipped with rechargeable batteries. These are shipped uncharged. Connect the unit to
AC power the first time you use it to charge the batteries.
Power Sensor
Sensors are available with a variety of connectors. Since the accuracy is critically dependent on the connectors used
at calibration, do not remove or change the connectors. Sensors are controlled by the Bird 4421 Power Meter.
4020 Series
Bird 4020 Series Power Sensors are designed for lab or field use and are accurate to within ±3% of reading.
4027A Series
Bird 4027A Series Power Sensors are designed for use in semiconductor processing and calibration applications.
Stringent calibration provides long‐term unit‐to‐unit repeatability, allowing consistent amounts of RF energy to be
applied to the etch process over many etch cycles. 4027A Sensors are accurate to ±1% at specified calibration fre‐
quencies and power levels.
CAUTION
Changing the sensor’s connectors will invalidate calibration data, and may reduce the
maximum power rating of the unit.