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2 technical data – INFICON MPG40x ATM to Ultra-High Vacuum Gauge User Manual

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6

tina48e1-b (2008-10) MPG400-401.om

2 Technical

Data

Measuring range (air, N

2

) 5×10

-9

… 1000 mbar

Accuracy (N

2

)

≈±30%

in the range 1×10

-8

… 100 mbar

Reproducibility

≈±5%

in the range 1×10

-8

… 100 mbar

Gas type dependence

→ Appendix B


Output signal (measuring signal)

Voltage range

0 … +10.5 V

Measuring range

1.82 … 8.6 V

Voltage vs. pressure

logarithmic, 0.6 V / decade
(

→ Appendix )

Error signal

<0.5 V no supply
>9.5 V Pirani measurement element

defective (filament rupture)


Output impedance

2×10

Ω

Minimum loaded impedance

10 k

Ω, short-circuit proof

Response time (pressure dependent)

p > 10

-6

mbar

p = 10

-8

mbar

<10 ms

≈1000 ms


Gauge identification

85 k

Ω referenced to supply common


Status Pin

6

p > 10

-2

mbar

Pirani-only mode

Low = 0 V

p < 10

-2

mbar

Cold cathode not ignited
Pirani-only mode

Low = 0 V

p < 10

-2

mbar

Cold cathode ignited
Combined Pirani / cold cathode
mode

High = 15 … 30 VDC

Lamp

High voltage on (LED on)


Supply

DANGER

The gauge may only be connected to power supplies, instruments or
control devices that conform to the requirements of a grounded extra-
low voltage (SELV-E according to EN 61010). The connection to the
gauge has to be fused

1)

.


Supply voltage at the gauge

15.0 … 30.0 VDC (ripple

≤ 1 V

pp

)

Power consumption

≤2 W

Fuse

1)

≤1 AT

The minimum voltage of the power supply must be increased proportionally to the
length of the sensor cable.
Voltage at the supply unit with
maximum line length

16.0 … 30.0 VDC (ripple

≤ 1 V

pp

)

1)

INFICON controllers fulfill these requirements.