INFICON MPG40x ATM to Ultra-High Vacuum Gauge - Manual (Page 3)

tina48e1-b (2008-10) MPG400-401.om
3
Contents
Product Identification 2
Validity 2
Intended Use 2
Functional Principle 2
1 Safety 4
1.1 Symbols Used 4
1.2 Personnel Qualifications 4
1.3 General Safety Instructions 4
1.4 Liability and Warranty 5
2 Technical Data 6
3 Installation 9
3.1 Vacuum Connection 9
3.1.1 Removing the Magnet Unit (Only for Gauges With CF Flanges) 11
3.2 Electrical Connection 12
3.2.1 Use With an INFICON Controller 12
3.2.2 Use With Another Control Device 12
4 Operation 13
4.1 Measurement Principle, Measuring Behavior 13
5 Deinstallation 15
6 Maintenance 16
6.1 Adjusting the Gauge 16
6.2 Cleaning MPG400, Replacing Parts 18
6.2.1 Disassembling MPG400 18
6.2.2 Cleaning MPG400 19
6.2.3 Reassembling MPG400 20
6.3 Cleaning MPG401, Replacing Parts 21
6.3.1 Disassembling MPG401 22
6.3.2 Cleaning MPG401 23
6.3.3 Reassembling MPG401 24
6.4 Troubleshooting 25
7 Accessories 26
8 Spare Parts 26
9 Returning the Product 28
10 Disposal 28
Appendix 29
A: Measuring Signal vs. Pressure 29
B: Gas Type Dependence 30
Declaration of Contamination 32
For cross-references within this document, the symbol ( → XY) is used.