2 cleaning mpg400, replacing parts, 1 disassembling mpg400 – INFICON MPG40x ATM to Ultra-High Vacuum Gauge User Manual
Page 18
18
tina48e1-b (2008-10) MPG400-401.om
DANGER
DANGER: cleaning agents
Cleaning agents can be detrimental to health and environment.
Adhere to the relevant regulations and take the necessary precautions
when handling cleaning agents and disposing of them. Consider
possible reactions with the product materials (
→ 7).
We recommend replacing the Pirani element when cleaning the gauge.
• Allen wrench AF 1.5
• Allen wrench AF 3
• Open-end wrench 7 mm
• Pliers for circlip
• Polishing cloth (400 grain) or Scotch-Brite
• Tweezers
• Cleaning
alcohol
• Mounting tool for ignition aid
• Ignition
aid
• Pirani element (13) incl. FPM seal (13a)
• FPM seal (11) for anode feedthrough
6
3
2
4
1
5
7
13
13a
8
8a
9
10
11
12
10a
Remove the gauge from the vacuum system (
→ 15).
Unfasten the hexagon socket set screw (1) on the electronics unit (2).
Remove the electronics unit without twisting it.
The cover of the electronics unit cannot be removed.
6.2 Cleaning MPG400,
Replacing Parts
Tools / material required
6.2.1 Disassembling MPG400
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