Figure 5-4 on, Figure 5-4 – INFICON Sputtering Sensor User Manual
Page 51
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Sputtering Crystal Sensor Operating Manual
Figure 5-4 2 3/4" Dual Coax Feedthrough with Air Tube (002-080)
BNC CONNECTOR
2-3/4 CONFLAT FLANGE
CONNECTOR MICRODOT
SEAMLESS TUBE (3)
0.188 O.D., 0.131 I.D.
9.00
0.5
5.00
2.15
#10/32 INTERNAL THREAD
0.265 DIA. (6)
0.312 HEXAGONAL
0.90
0.45
2.75
0.40
0.20
0.45
0.40
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