INFICON Sputtering Sensor - Manual (Page 39)

3 - 3
IP
N 07
4-
15
7L
Sputtering Crystal Sensor Operating Manual
3.4 Electrical and Pneumatic Connections
3.4.1 Electrical
To complete installation of the assembly, make electrical connections where
indicated in
Figure 5-5 on page 5-6 to either 24 V(ac) or V(dc). Current required
is approximately 70 mA.
CAUTION
Maximum applied voltage must not exceed 26 V(ac).
3.4.2 Pneumatic
Figure 3-1 Pneumatic Solenoid Tube Connections
TO AIR
FITTING OF
FEEDTHROUGH
EXHAUST
(Normally Open)
A OUTPUT
PORT
P SUPPLY
(Normally Closed)
80-90 PSIG
AIR SUPPLY
TUBE FITTING
(Provided with Valve)
Figure 3-1a
Solenoid Valve
Without Orifice
(As Supplied)
Figure 3-1b
Solenoid Valve
With Orifice
(Installed by User)
EXHAUST
(Normally Open)
Figure 3-1b shows the proper installation for
all CrystalSix applications.
A OUTPUT
PORT
P SUPPLY
(Normally Closed)
TO AIR
FITTING OF
FEEDTHROUGH
80-90 PSIG
AIR SUPPLY
TUBE FITTING
(Provided with Valve)
ORIFICE (059-189)
(Provided with Accessory Kit 750-268-G1)
90-95 PSIG for the
Sputtering Shutter
IPN 750-005