INFICON Sputtering Sensor - Manual (Page 32)

2 - 10
IP
N 07
4-
15
7L
Sputtering Crystal Sensor Operating Manual
2.5 Sensor Shutter Function Check
Temporarily connect an air supply — (90-95 PSIG (6.2-6.55 bar) [620-655 kPa];
110 PSIG (7.6 bar) [760 kPa] maximum) — to the actuator air line and test
operation (10-15 cycles). When actuated, shutter movement should be smooth,
rapid, and complete, and should contract completely from the crystal opening.
When deactivated, the shutter should completely cover the crystal opening. If
operation is impaired, lubricate the moving parts, in areas specified on
Figure 1-6
on page 1-10 , with molybdenumdisulfide or its equivalent. If the function check
was successful, make appropriate pneumatic, water, and coax cable connections
using a suitable feedthrough assembly. Consult
section 4.5 on page 4-5 for
information regarding maintenance of the sensor shutter.
WARNING
Do not exceed the maximum pressure rating of 110 PSIG
(7.6 bar) [760 kPa]. Connection to excessive pressure
may result in personal injury or equipment damage.