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Figure 5-3 – INFICON Sputtering Sensor User Manual

Page 50

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Sputtering Crystal Sensor Operating Manual

Figure 5-3 2 3/4" Single Coaxial Feedthrough

(002-043 - Copper Gasket)
(002-044 - Viton)

BNC CONNECTOR

2-3/4 CONFLAT FLANGE

CONNECTOR MICRODOT

SEAMLESS TUBE (3)

0.188 O.D., 0.131 I.D.

0.5

5.00

9.00

0.265 DIA. (6)

0.40

0.20

0.30

0.60

2.75