INFICON Sputtering Sensor - Manual (Page 47)

5 - 1
IP
N 07
4-
15
7L
Sputtering Crystal Sensor Operating Manual
Chapter 5
Feedthrough Outline Drawings
5.1 List of Supplied Drawings
The following Feedthrough Outline Drawings provide dimensions and other
pertinent data necessary for planning equipment configurations.
Figure 5-1 . . . . . . . . . . . . . . . . . . . . 1" Crystal Feedthrough (002-042) (contains
one coaxial and two water tubes)
Figure 5-2 . . . . . . . . . . . . . . . . . . . . 1" Crystal Feedthrough w/Air Tube (IPN
750-030-GI) (contains one coaxial, two water
tubes and one air tube).
Figure 5-3 . . . . . . . . . . . . . . . . . . . . Standard 2 3/4" ConFlat® (IPN
002-043/002-044) (contains one coaxial and
two water tubes).
002-043 utilizes copper gasket
002-044 utilizes Viton® gasket
Figure 5-4 . . . . . . . . . . . . . . . . . . . . Standard 2 3/4" ConFlat® Flange (002-080)
(contains two coaxials, two water tubes and
one air tube).
Figure 5-5 . . . . . . . . . . . . . . . . . . . . 2 3/4" Dual Coaxial Feedthrough and Valve
Assembly
Figure 5-6 . . . . . . . . . . . . . . . . . . . . Solenoid Valve Assembly