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16000 hours maintenance – INFICON UL5000 Dry Helium Leak Detector User Manual

Page 94

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94

Maintenance works

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9.5.4

16000 hours maintenance

The 8000 hours maintenance should be performed by an INFICON service tech-
nician or an other authorized person.

After 16000 working hours the bearing of the turbo pump and the different kind of fore
pump will reach their expecting life time.

The scroll module (IWATA ISP 500 or Varian TS 620) and the turbo pump must be
replaced.

The maintenance work will take approximately 10.0 hours.

Work to be performed

Required materials

P/N

Exchange the scroll module (IWATA ISP-
500B)

Scroll module for IWATA ISP-500B

200000217R

Exchange the scroll module (Varian TS
620)

Scroll module for Varian TS 620

200001665R

Replace TMH 071

Turbo pump TMH 071

200000569R

Take apart the valve bloc and clean it

Replace the seals for valves

Set of seals for valve bloc

Set of seals for valves

200000593

200000594

Check and/or replace Filters

Spare Filter Cell for the fans

Spare Filter for venting and purge line

Silencer for exhaust (only UL1000 Fab)

200000685

200000683

20099183

Functional check and adjustement