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Technical data, Physical data, 2 technical data – INFICON UL5000 Dry Helium Leak Detector User Manual

Page 13: Caution

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General Information

13

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74

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1

.f

m

te

chn

ica

l ha

nd

boo

k

(1

40

8)

1.3.2

Technical Data

1.3.2.1

Physical Data

Max. inlet pressure

15 mbar

Minimum detectable Helium leak rates

in vacuum mode (ULTRA)

5×10

-12

mbar l/s (see

following CAUTION)

in sniffer mode

< 5×10

-8

mbar l/s

Maximum Helium leak rate which can be displayed

0.1 mbar l/s

Measurement range

12 decades

Time constant of the leak rate signal (blanked off,
63% of the final value)

<1 s

Roughing capability

25 m

3

/h, 17.6 cfm

(50 Hz)

Pumping speed (Helium) at the inlet (EN 1518)

30m³/h, 21.1 cfm
60 Hz

in vacuum mode

GROSS mode

8 l/s

FINE mode

20 l/s

ULTRA mode

>20 l/s

Detectable masses

2, 3 and 4

Mass spectrometer

180°
magnetic sector field

Ion source

2 filaments;
Iridium/Yttriumoxide

Inlet port

DN 40 KF

Run-up time (after starting)

 4 min

Caution

To get down to the minimum detected leak rate range some conditions must be
fulfilled:

UL5000 has fully warmed up

Ambient conditions must be stable (temperature, no vibration/
accelerations.)

The part under test has been evacuated long enough (background
is no longer decreasing)

ZERO must be active