INFICON UL5000 Dry Helium Leak Detector - Manual (Page 92)

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Maintenance works
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9.5.2 4000 hours maintenance
The 4000 hours maintenance should be performed by an INFICON service tech-
nician or another authorised person at least yearly.
Independently of 4000 working hours the lubricant reservoir of the Turbomolecular
pump and the oil in the Fore pump should be replaced at least yearly.
Notice: The internal Helium standard leak certificate is valid for one year after
delivery. The annual refurbishing of the internal Helium standard leak is
recommended and an other certificate will be delivered. The internal
Helium standard leak can be refurbished at INFICON GmbH in Cologne
exclusively.
The maintenance work will take approximately 3 hours.
Work to be performed Required materials P/N
Replace the Lubricant Reservoir of the
Turbomolecular Pump TMH 071
(every 2 years) • Lubricant Reservoir for TMH 071 200000577
Check and/or replace Filters • Spare Filter Cell for the fans
• Spare Filter for venting and purge line
• Silencer for exhaust (only UL1000 Fab)
• Filter cell for oil filter.
200000685
200000683
20099183
200000694
Functional check and adjustement